SERVOPRO NANOCHROME

SERVOPRO

 

Sub-ppb trace measurement of multiple gases for the UHP semiconductor industry

Incorporating the latest advances in gas sensing technology and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements for the semiconductor industry.

Features

  • In compliance with Low Voltage, EMC and applicable Directives.
  • New PED Sensor technology enables sub-ppb measurements of H2, CH4, CO, CO2, N2, Ar and NMHC.
  • Enables unique total Servomex solution for UHP gas analysis.

Sensing Technology

  • Plasma

Gas Measured

  • Multiple Gases

Unit Measurement

  • ppb (trace)
  • ppt (trace)

Application

  • CQC Quality Control
  • UHP Semicon Application

Download e-Catalogue Back