SERVOPRO NANOCHROME
SERVOPRO
Sub-ppb trace measurement of multiple gases for the UHP semiconductor industry
Incorporating the latest advances in gas sensing technology and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements for the semiconductor industry.
Features
- In compliance with Low Voltage, EMC and applicable Directives.
- New PED Sensor technology enables sub-ppb measurements of H2, CH4, CO, CO2, N2, Ar and NMHC.
- Enables unique total Servomex solution for UHP gas analysis.
Sensing Technology
Gas Measured
Unit Measurement
Application
- CQC Quality Control
- UHP Semicon Application
Download e-Catalogue
Back