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(1) POU - Vessel Only Purifier |
(2) POU - NOVA Series Purifier |
(3) POU - Pro-Panel Purifier |
(4) Microbulk Purifier |
(5) Bulk Purifier |
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Flow (slpm) |
0.1 - 100 |
0.1 - 100 |
0.1 - 100 |
100-1200 |
60 - > 5000m3/hr |
Filtration |
0.1 µm standard, 0.003 µm optional |
Max Operating Pressure |
250 psig (17.24 bar) |
150 psig (10.34 bar) |
250 psig (17.24 bar) |
Wetted Surface |
Electro-polished, <10Ra, 316L stainless steel |
Helium Leak Check |
< 2 X 10-9 atm cc/sec |
Weldment |
Semi-automated welding; conducted in class 100 clean zones using purified Argon cover gas |
Typical Inlet Gas Purity |
99.999% (50 ppm maximum) |
Outlet Purity |
< 1ppb ( Refer to table below for Related Gases Purified and Impurities removed ) |
Input Power |
100VAC, 120VAC, 230VAC, 50/60Hz, 600W (max) |
Dependent on Flow Rate |
Inlet/Outlet Fittings |
VCRTM standard, optional SwagelokTM or tube stub |
Operating Air Supply |
60-90 psig ( only applicable with air-operated option) |
Description |
ARM’s Point-of-Use vessel only purifiers designed to operate without requiring heat to remove impurities. Factory regeneration is available for applicable models. |
The Nova Series purifiers incorporate a heater, temperature indication and control. They are typically used when the process gas and impurities to be removed indicate a heated operation is required. Manual inlet/outlet and bypass valves are typical options specified for ease of vessel replacement / regeneration. |
The Pro-Panel Series purifiers is similar to the Nova Series purifiers, but offers more automation and integration. Automated heater control, pneumatic inlet / outlet valves and customer contacts for interfacing with a host for alarm/indication are standard with the Pro-Panel Series. Pneumatic bypass valve operation is an option. |
PLC Control, Heated or Ambient; Valve Option - Manual or Pneumatic; H2 removal stage option - Yes/No; Connection option - VCR / Swagelok / tube stub; Internet Accesbility Option; Getter / Catalyst / Adsorber Options; Protected environment installation; NEMA rated outdoor installation. |
PLC Control, Heated or Ambient; Valve Option - Manual or Pneumatic; H2 removal stage option - Yes/No; Connection option - VCR / Swagelok / tube stub; Internet Accesbility Option; Getter / Catalyst / Adsorber Options; Protected environment installation; NEMA rated outdoor installation. |
Features |
Heated Operations |
No |
Yes |
Yes |
Yes |
Yes |
Optional inlet/outlet/bypass valves |
Yes |
Yes |
Yes |
Yes |
Yes |
Optional pneumatic inlet/outlet valves |
N/A |
Yes |
Yes |
Yes |
Yes |
Power status LED |
N/A |
Yes |
Yes |
N/A |
N/A |
Ready (for operation) LED |
N/A |
Yes |
Yes |
N/A |
N/A |
Thermocouple fault LED |
N/A |
Yes |
Yes |
N/A |
N/A |
Process LED |
N/A |
No |
Yes |
N/A |
N/A |
Alarm LED |
N/A |
No |
Yes |
N/A |
N/A |
Valves open LED |
No |
No |
Yes |
N/A |
N/A |
Gases Purified and Impurities Removed |
Refer to Table Below |